APPARATUS FOR REMOVING PARTICLES FROM SURFACE OF DISC IN CMP EQUIPMENT

摘要

PURPOSE: An apparatus for removing particles from a surface of a disc in CMP equipment is provided to reduce an error rate and scratches and lengthen the lifetime by preventing the damage of the disc. CONSTITUTION: A plurality of injection nozzles(40,41) are installed in a predetermined interval at one side of a clean cup(14) in order to inject deionized water to a lateral part of a disc. A conditioning disc(16) is restored to the clean cup. An injection nozzle(42) is installed at bottom of the clean cup in order to inject the deionized water to a bottom of the disc. A disc detection sensor(50) is installed at one side of the clean cup in order to detect a restoring state of the disc.