发明名称 APPARATUS AND METHOD FOR FABRICATING S.R.P SPECIMEN
摘要 PURPOSE: An apparatus and a method for fabricating an S.R.P specimen are provided to exactly analyze S.R.P and know S.R.P results through difference angles by means of the same specimen by designing a specimen holder capable of moving in up and down directions and by resetting an angle of the specimen. CONSTITUTION: An apparatus for fabricating S.R.P specimen includes a lower supporting part(4), a fixture upper layer part(5), a movement upper layer part(6), and a position change unit(7). The lower supporting part(4) is a plate type and a V-shape groove. The fixture upper part(5) is fixed to a plane surface of the lower supporting part(4). The movement upper layer part(6) is spaced from the fixture upper layer(6) by a predetermined angle. A method for fabricating S.R.P specimen establishes an angle of a specimen to be measured by adjusting the movement upper layer part(6).
申请公布号 KR20040069761(A) 申请公布日期 2004.08.06
申请号 KR20030006301 申请日期 2003.01.30
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 KIM, DONG GYO
分类号 G01B11/00;(IPC1-7):G01B11/00 主分类号 G01B11/00
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