| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer irradiation device which has a silica glass as a light transmitting member and performs irradiation processing while having a high ultraviolet-ray transmissivity. SOLUTION: The excimer irradiation device for radiating vacuum ultraviolet light having a wavelength of 172 nm is provided. In the method having the light transmitting member made of the silica glass having an OH radical concentration of 150 to 400 ppm, the vacuum ultraviolet light is transmitted through the light transmitting member. During a period of time after the light transmissivity of the light transmitting member for a wavelength of 172 nm decreases until the transmissivity again increases, the device is operated at least in its running-in mode. COPYRIGHT: (C)2004,JPO&NCIPI
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