METHOD AND DEVICE FOR PRODUCING CORPUSCULAR RADIATION SYSTEMS

摘要

The invention relates to a method for producing corpuscular radiation systems (10-10 "", 12-12"), whereby at least one first corpuscular radiation system (10-10 "") is produced on a first substrate (14) by means of computer-controlled, corpuscular radiation-induced deposition, and at least one second corpuscular radiation system (12-12 ") is produced on at least one second substrate (16) by the at least one first corpuscular radiation system (10-10 "") by means of computer-controlled, corpuscular radiation-induced deposition. The inventive method can be used to produce a plurality of corpuscular radiation systems in a relatively short space of time.