Laminated microelectromechanical component, e.g. rotation rate sensor, micro swing mirror, acceleration sensor, comprises electric conductive structure integrated in functional layer

摘要

The component substrate (12) has first dielectric layer (11) and functional layer (5), spaced from first layer and/or substrate in free-support region. In sections of this region, conductive structure (13) is integrated into functional layer. Alternatively, conductive structure extends in free-support region on functional layer side, facing first dielectric layer. Conduction structure may be coupled by anchoring element to specified contact spots, or conductive structure of first layer.