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发明名称
Verfahren zum Behandeln eines Halbleiter-Wafers
摘要
申请公布号
DE19751785(B4)
申请公布日期
2004.08.05
申请号
DE19971051785
申请日期
1997.11.21
申请人
TRIKON EQUIPMENTS LTD., NEWPORT
发明人
DOBSON, CHRISTOPHER DAVID
分类号
C23C14/00;C23C14/02;C23C14/58;C23C16/30;H01L21/28;H01L21/285;H01L21/768;(IPC1-7):H01L21/768;H01L23/532;C23C28/00;H01L21/283
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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