| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method that can reduce manufacturing cost caused by a tape base material while machining accuracy is maintained. <P>SOLUTION: The laser beam machining method consists of an inclination recognizing step that recognizes the inclination of the tape 8 on the basis of a relative position between the tape 8 and the reference coordinate preset for determining a laser beam machining position; a position correcting step that corrects positional errors of laser beam machining on the basis of the recognized inclination of the tape 8; and a patterning step that performs patterning of the tape 8 using a laser beam on the basis of the corrected position and that forms, on the tape 8, machining reference marks A1, A2, A3, A4, etc., for correcting positional errors of laser beam machining in the next patterning step. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
