| 摘要 |
PROBLEM TO BE SOLVED: To provide a film-forming apparatus for forming such a multilayer film as to make the product get a passing grade. SOLUTION: This apparatus has a crucible 40A for accommodating a vaporizing material, an electron gun 42A, a deflector for leading an electron beam from an electron gun onto the vaporizing material in the crucible, a scanner for scanning the vaporizing material with the electron beam, and a rotation substrate 33 for making the particles vaporized from the crucible form a film thereon, all arranged in an air-exhausted chamber 31. In addition, the apparatus has X and Y stages 44A and 43A for moving the crucible 40A along a face parallel to the surface to be film-formed of the substrate 33, and X and Y stages 37 and 36 for moving the substrate 33 along the face parallel to the surface to be film-formed of the substrate. COPYRIGHT: (C)2004,JPO&NCIPI
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