| 摘要 |
PROBLEM TO BE SOLVED: To provide a film formation apparatus which, in forming a gas-barrier thin film on the outer surface of a plastic container, can sufficiently apply a self-bias voltage to the outer surface of the plastic container so as to form a thin film capable of functioning as a gas-barrier thin film; and a method using the apparatus. SOLUTION: The apparatus for producing a plastic container coated with a gas-barrier thin film has the following features: the container is filled with an electrolytic solution as a conductive medium for electromagnetic wave electric power; in generating plasma, the electrolytic solution is given a role similar to that of an electrode having the same shape as the inner shape of the container and having been inserted into the container, thus causing a uniform and sufficient self-bias voltage to appear on the outer surface of the container to form a dense thin film; and the film formation by reduced-pressure plasma CVD or atmospheric-pressure plasma CVD can be carried out. COPYRIGHT: (C)2004,JPO&NCIPI
|
