发明名称 ADHESIVE-TAPE STICKING METHOD AND APPARATUS THEREOF
摘要 PROBLEM TO BE SOLVED: To perform adhesive sticking while accumulating less stress on an adhesive tape and while following enough irregular steps present on the surface of a work, in an adhesive-tape sticking apparatus for sticking a protective tape on the surface of the work. SOLUTION: The adhesive-tape sticking apparatus has a chucking table 10 for mounting and holding a work W thereon, a tape feeding means for feeding a strip-form adhesive tape T to the mounted and held work W, a sticking means for so contacting a sticking roller 25 with the surface of the fed adhesive tape T as to stick the adhesive tape T on the surface of the work W, and a vibration generating mechanism 28 for vibrating finely the sticking roller 25. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004221469(A) 申请公布日期 2004.08.05
申请号 JP20030009652 申请日期 2003.01.17
申请人 NITTO DENKO CORP 发明人 YAMAMOTO MASAYUKI
分类号 C09J7/02;B29C63/00;B29C63/02;B65B33/06;H01L21/00;H01L21/304;H01L21/683;H01L23/50;(IPC1-7):H01L21/304;H01L21/68 主分类号 C09J7/02
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