| 摘要 |
PROBLEM TO BE SOLVED: To form an amorphous carbon film superior in electrical conductivity, corrosion resistance and adhesiveness. SOLUTION: A method for manufacturing a composite of an amorphous carbon film with a substrate having high conductivity comprises (1) immersing the substrate in methane gas plasma in a vacuum chamber, irradiating the substrate with positive ions in the plasma, and forming an ion-implanted layer on the surface layer of the substrate; (2) introducing hydrocarbon into the vacuum chamber, generating plasma, depositing hydrocarbon radicals on the substrate, applying a negative high-voltage pulse to the substrate, and acceleratingly irradiating the substrate with the positive ions; (3) at the same time, applying a high-voltage positive pulse (0.5 to 15 kV) to the substrate, and irradiating the substrate with electrons in the plasma to activate only the surface layer by the pulse and converts it into a high-temperature state; and (4) depositing the amorphous carbon film with high conductivity on the substrate by the steps of (1) to (3) described above. COPYRIGHT: (C)2004,JPO&NCIPI
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