| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device having a detection device that can easily select image formation, especially according to backward scattered electrons and secondary electrons, capable of detecting the electrons simultaneously as much as possible. SOLUTION: The electron beam device 7 has an adjustable throttling 20 provided in relation to the detectors 19, 21. The detection device has a detector 21, and a reflection device making electron reflect on the detector 21 is arranged to the detector. COPYRIGHT: (C)2004,JPO&NCIPI
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