发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that can restrain a chip area to monitor an LSI (large scale integrated circuit) internal signal in real time with a limited memory capacity. SOLUTION: An input switch signal 8 is set in a test mode by a test enable signal input from a test setting terminal 5, and a signal input from a tester 2 is input into an address control 9. An address signal is generated from an input internal signal selection data in the address control 9 to be output to a storage circuit 10. The storage circuit 10 is able to rewrite an output switch data from time to time, using a rewritable memory. An output switch selection signal in response to the address signal controls a test output switch 12 inserted into a prescribed internal node inside an internal circuit 7. The internal signal of the internal node is output to an output selection circuit 11, and the internal signal selected by an output selection signal generated in the address control 9 is output to a test output terminal 6. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004219296(A) 申请公布日期 2004.08.05
申请号 JP20030007933 申请日期 2003.01.16
申请人 TOSHIBA CORP 发明人 TSUJITA TAKETOSHI
分类号 G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/28 主分类号 G01R31/28
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