PROFILE MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a profile measuring apparatus capable of noncontact and highly accurate measurement on the surface profile of a hot material through the use of an optical sensor. SOLUTION: The profile measuring apparatus K is provided with a laser displacement sensor 10; an LM guide mechanism 20; an air blowing mechanism 40; and a thermal shield part 50. The LM guide mechanism 20 is capable of moving the displacement sensor 10 in two orthogonal axial directions. The air blowing mechanism 40 comprises both a sensor hood 41 capable of housing the displacement sensor 10 inside and interlocking with the movements of the displacement sensor 10 and a required number of air nozzles 41b and 41b arranged in the sensor hood 41 in such a way as to be directed toward an air blowing opening 41a of the sensor hood 41. The thermal shield part 50 is constituted in such a way as to thermally shield the LM guide mechanism 20. COPYRIGHT: (C)2004,JPO&NCIPI