| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat generating resistant element having a high durability and a high resistance suitable for constituting an electrothermal converting member in an ink jet head or an ink jet apparatus. SOLUTION: There employed is, as the heat generating resistant element, a film constituted of Cr, Si and N, having a composition of: Cr, 15 to 20 at.%; Si, 40 to 60 at.%; and N, 20 to 45 at.%, which constitute 100 atom% or substantially 100 atom%. COPYRIGHT: (C)2004,JPO&NCIPI
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