发明名称 |
INTEGRATED SURFACE-MACHINED MICRO FLOW CONTROLLER METHOD AND APPARATUS |
摘要 |
<p>A surface-micromachined mass flow controller (MFC) comprises an electrostatically actuated microvalve integrated with a thermal flow sensor. The microvalve comprises a normally-open diaphragm defining an aperture allowing fluid communication between first and second flow channels. The diaphragm includes a second electrode actuable toward a valve seat including a first electrode. Fabricated utilizing a multilayer Parylene process, the active microvalve and the flow sensor are integrated onto a single chip to perform closed-loop flow control. For flow control, both Pulse Width Modulation (PWM) and actuation voltage adjustment are demonstrated.</p> |
申请公布号 |
WO2004065830(A1) |
申请公布日期 |
2004.08.05 |
申请号 |
WO2004US01048 |
申请日期 |
2004.01.14 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY;XIE, JUN;SHIH, JASON;TAI, YU-CHONG |
发明人 |
XIE, JUN;SHIH, JASON;TAI, YU-CHONG |
分类号 |
B81B3/00;F16K31/00;F16K99/00;G01F1/684;G01F15/00;G05D7/06;(IPC1-7):F16K31/02 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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