ELECTRON MICROSCOPE INCLUDING VACUUM CONTAINER, VACUUM PUMP, ELECTRON SOURCE, SAMPLE CHAMBER AND ELECTRON BEAM DETECTOR INTEGRATED INTO SINGLE UNIT

摘要

PURPOSE: An electron microscope is provided to reduce weight and space occupation of the microscope and shorten the start time of the microscope. CONSTITUTION: An electron microscope comprises an electron microscope housing(11), and a display(10) arranged in the electron microscope housing. The electron microscope housing accommodates a vacuum container(14); a vacuum pump(12) for vacuum exhausting air from the vacuum container; an electron source(13) attached on the vacuum container; a sample chamber(16) attached beneath the vacuum container in such a manner that the sample chamber is protrusile from the electron microscope housing; and an electron beam detector(15) for detecting electron beams from a sample arranged in the sample chamber. The vacuum container, vacuum pump, electron source, sample chamber, and the electron beam detector are integrated into a single unit in the electron microscope housing.