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发明名称
KORRIGIERVORRICHTUNG ZUR BEHEBUNG DES CHROMATISCHEN FEHLERS IN KORPUSKULAROPTISCHEN GERÄTEN
摘要
申请公布号
DE69822802(T2)
申请公布日期
2004.08.05
申请号
DE19986022802T
申请日期
1998.10.22
申请人
FEI CO., HILLSBORO
发明人
TIEMEIJER, CHRISTIAAN
分类号
H01J37/153;(IPC1-7):H01J37/153
主分类号
H01J37/153
代理机构
代理人
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地址
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