METHOD FOR GENERATING OZONE

摘要

PROBLEM TO BE SOLVED: To prevent lowering ozone concentration while preventing a harmful influence by adding nitrogen when ozone is generated by supplying high purity oxygen to an electrical discharge type ozonizer. SOLUTION: A gas composed of carbon and oxygen (CxOy gas) and nitrogen are added altogether in the high purity oxygen when supplied to the ozonizer from an oxygen source. The addition amount of nitrogen can be controlled to be 0.01% or less which does not cause the harmful influence and the addition amount of the gas composed of carbon and oxygen (CxOy gas) can be controlled to be 1.0% or less which is economical. The gas composed of carbon and oxygen (CxOy gas) is typically carbon dioxide, carbon monoxide or their mixed gas. COPYRIGHT: (C)2004,JPO&NCIPI