发明名称 LINEAR PIEZO DRIVE UNIT COMPRISING A GROUP OF STACKED PIEZO ACTUATORS
摘要 Disclosed is a linear piezo drive unit (12) comprising a group of stacked piezo actuators which drive an armature (17) that is placed in a guide. Said actuators are provided with several stacks (14) that are located on a common support element. A first stack part (15) within a stack (14) is embodied as a longitudinal actuator starting from the support element (13) while a second stack part (16) within said stack (16) is embodied as a shearing actuator. The individual stacks (14) are in clamping contact and/or shearing contact with the armature (17) and reciprocally perform clamping and advancing movements in a stepped operation. At least one connecting element (18) is disposed between the first stack part (15) that is embodied as a longitudinal actuator and the at least one second stack part (16) which is embodied as a shearing actuator. Said connecting element (18) interconnects at least one respective part of the stacks (14) and is configured in a non-rigid manner in the actuating direction of the longitudinal actuators (15) while being configured in a rigid manner in the direction of movement of the armature (17).
申请公布号 WO2004066405(A1) 申请公布日期 2004.08.05
申请号 WO2004EP00176 申请日期 2004.01.14
申请人 CARL ZEISS SMT AG;RIEF, KLAUS;FISCHER, JUERGEN 发明人 RIEF, KLAUS;FISCHER, JUERGEN
分类号 H01L41/09 主分类号 H01L41/09
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