COMPONENT FOR FILM FORMING DEVICE AND METHOD OF WASHING THE COMPONENT

摘要

A component for a film forming device capable of forming thin-film on a substrate by using a film-formation material and having such a structure tha t adhered film can be easily removed in short time in washing even if the component is formed in such a surface structure that the adhered film is har d to be damaged and peeled off, and a method of washing the component, the component wherein a large number of through-holes ranging from the rear face to the front face of the component are provided to allow washing fluid to penetrate into a boundary surface between the component of the film formatio n device and the adhered film formed of the film formation material adhered on to the surface of the component when the thin-film is formed. Thus, the adhered film can be easily removed by peeling off the film in a shorter time than in a case in which the adhered film on the front surface only is dissolved with washing fluid.