THREE-DIMENSIONAL SHAPE MEASURING DEVICE, THREE-DIMENSIONAL SHAPE MEASURING METHOD AND TARGET MARK

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device, a three-dimensional shape measuring method and target marks synthesizing three-dimensional data measured from a plurality of viewpoints using the target marks. SOLUTION: A measurement part 2 obtains the three-dimensional data of a measurement object disposed with the plurality of target marks with different color scheme patterns and obtains two-dimensional image of a measurement object. A target mark identification part 511 individually identifies the target marks in the two-dimensional image based on the color scheme patterns and specifies the positions of the target marks in the two-dimensional image. A three-dimensional data synthesizing part 513 synthesizes the plurality of three-dimensional data obtained from a plurality of viewpoints by fitting the positions of the target marks in the three-dimensional data with the positions of the target marks in the three-dimensional data obtained from the measuring part 2' having the different viewpoint from the measuring part 2. COPYRIGHT: (C)2004,JPO&NCIPI