| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting position which conducts position detection with high resolution, using short-wavelength laser light and conducts position detection with a high signal-to-noise ratio, even in a lighted environment. SOLUTION: The method of detecting position detects the distance, from a position detector which comprises at least a transmission photoreceptor, including a semiconductor to an object to be measured by using a laser beam. The wavelength of the laser beam is not longer than 450nm, and the bandgap of the semiconductor is set not smaller than 2.0eV. COPYRIGHT: (C)2004,JPO&NCIPI
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