| 摘要 |
PROBLEM TO BE SOLVED: To reliably produce a film of high quality with a gradient composition, in which the distribution of a quantity of a formed film continuously changes corresponding to each position from one end to the other end on a substrate face. SOLUTION: This film-producing apparatus has a substrate 113 arranged in a film-forming chamber 110 of the film-forming apparatus 100 of which the atmosphere and the pressure are adjusted by an atmospheric pressure regulation means 103, so as to face a boat 111 housing a raw material; and a shielding plate 112 installed between the above boat 111 and the substrate 113, which has a function of intercepting one part of vapor among vapors having vaporized from the above raw material, together with a function of gradiently introducing the rest vapor to a predetermined position on the surface of the above substrate 113, by a steam control action exerted by one end face. COPYRIGHT: (C)2004,JPO&NCIPI
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