| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polarization method of a piezoelectric structure wherein variations of characteristics of elements cut out from the piezoelectric structure can be reduced by making uniform a polarization distribution in the piezoelectric structure. <P>SOLUTION: The polarization method of the piezoelectric structure has a property that the polarization distribution is higher at the center thereof but is lower along a periphery thereof when the piezoelectric structure having a predetermined thickness and comprising piezoelectric ceramics is applied with a uniform electric field and is polarized in the direction of its thickness. In the method, a periphery of at least one of the surface and rear surface of the piezoelectric structure is processed such that it is gradually made thinner in its thickness as it goes from the central part to the peripheral part, and an electrode for polarization is formed on the surface and rear surface of the processed piezoelectric structure, which electrode is in turn subjected to a DC electric field for polarization processing. The polarization at the end of the piezoelectric structure where the polarization is likely to become lower is prevented from being lowered by intentionally increasing the strength of the electric field by making thinner the the piezoelectric structure at the end of the same. As a result, the polarizability in the piezoelectric structure is made uniform. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
