METHOD AND EQUIPMENT FOR VERIFYING PRECISION OF THICKNESS METER

摘要

PROBLEM TO BE SOLVED: To provide a precision verification method and precision verification equipment for thickness meters for verifying the precision of a thickness meter for film sheets, with high precision. SOLUTION: This precision verification equipment is composed by arranging a metal displacement sensor 302 in the center part of the underside of a mounting base material 301, arranging a laser irradiation means 303 and a laser light-receiving means 304 in both end parts of the underside, and fitting a reference gauge 305 between the displacement sensor 302 and a reference roll 308, so as to be freely detachable or movable and freely detachable. This equipment measures the dimension of the interval (a) between the displacement sensor 302 and the reference roll 308, in a state with the reference gauge 305 not being attached. Next, the reference gauge 305 is arranged between the displacement sensor 302 and the reference roll 308, and the dimension of the interval b between the displacement sensor 302 and the reference gauge 305, and the dimension of the interval c between the reference gauge 305 and the reference roll 308 are measured. The degree of coincidence of the thickness dimension d of the reference gauge 305, calculated from d=a-(b+c) with respect to a known reference thickness dimension d0of the reference gauge 305, is verified. COPYRIGHT: (C)2004,JPO&NCIPI