| 摘要 |
PROBLEM TO BE SOLVED: To facilitate a determination method for determining a condition of the presence of a trouble in every stress impression, in burn-in for a semiconductor device using a scanning chain. SOLUTION: This device is provided with the scanning chain having an input terminal and an output terminal to input a rectangular data equal to a period of a scanning clock from the input terminal, an EOR circuit using, as inputs, output terminals of two flip-flops distant by an odd number of stages on the scanning chain, and a monitor terminal wired to an output of the EOR circuit. An oscilloscope or the like is connected to an output of the monitor terminal to display the output, the output of the monitor terminal is brought into an H output all the time when no trouble exists on the scanning chain, and is brought into an L output all the time when the trouble exists thereon. COPYRIGHT: (C)2004,JPO&NCIPI
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