| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode forming method by which there is no short circuit defect between electrodes in a substrate and scattered matter (particle) by laser light irradiation causing short circuit between facing electrodes at the time of forming a display panel by a conventional remedy method, does not remain. SOLUTION: A resist film of a desired shape is formed on a film for the electrode disposed on the substrate, the film for the electrode exposed from an opening of the resist film is etched with the resist film as an etching resistant film. Further removal of the resist film, washing or the like are performed to form the electrode of a shape corresponding to the resist film of a prescribed shape. In this manufacturing method of the electrode for the display panel by a photo-etching method, a removal process for removing a pattern defect part of the resist film causing short circuit defect between electrodes is performed after the process for forming the resist film of the prescribed shape and before the etching process. The removal process is performed for removing the pattern defect part of the resist film by the laser light irradiation. COPYRIGHT: (C)2004,JPO&NCIPI
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