| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring device capable of performing proper measurement to a measuring object having a large aspect ratio (height/width or height), especially a probe microscope such as an atomic force microscope or a magnetic force microscope which is a high-resolution surface shape measuring device. SOLUTION: This surface shape measuring device for measuring the sample shape by using a probe has a constitution wherein angular correction mechanisms are provided on the sample side and on the probe side, and the shape is measured by correcting the angle by the angular correction mechanisms provided on the sample side and the on probe side based on a measurement result of a sample whose angle is known and the inclination degree of the sample to be measured actually. COPYRIGHT: (C)2004,JPO&NCIPI
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