Transport arrangement for wafer containers in clean rooms has 2 synchronously driven, mutually parallel endless belts passed over rollers, on which containers are placed, supporting, drive rollers.

摘要

The arrangement has two synchronously driven and mutually parallel endless belts (1) passed over rollers on which the containers are placed, at least three supporting rollers (2) for each belt arranged in a plane with parallel rotation axes, at least one drive roller per belt connected to a rotary drive (5) and a tensioning roller (4) per belt below the supporting roller plane.