发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which can be made very reliable and reduce the power consumption. <P>SOLUTION: The semiconductor device includes a first element isolation region 19 and a second element isolation region 29 which are both provided in a semiconductor layer 10. The width Y<SB>1</SB>of the first element isolation region 19 and the width Y<SB>2</SB>of the second element isolation region 29 are made different from each other. The ratio of depth X<SB>1</SB>to width Y<SB>1</SB>of the first element isolation region 19 is made nearly equal to the ratio of depth X<SB>2</SB>to width Y<SB>2</SB>of the second element isolation region 29. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004221485(A) 申请公布日期 2004.08.05
申请号 JP20030009934 申请日期 2003.01.17
申请人 SEIKO EPSON CORP 发明人 TANIGUCHI YOSHIHIRO
分类号 H01L21/76;H01L21/8244;H01L27/11 主分类号 H01L21/76
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