| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional structure usable as a comb-tooth actuator which has a simple constitution, can easily be manufactured, has an excellent mechanical strength, and has high electric reliability. SOLUTION: At the flat part of a substrate 10, a mirror 20 and a 1st electrode 31 which is coupled with it are formed. Parts of the substrate 10 are slope parts 12A and 12B bent along a bent part 11 which is incompletely separated, and a 2nd electrode 32 is formed at the slope parts 12A and 12B. The 2nd electrode 32 has a gap 33 perpendicular to the flat part of the substrate 10 with respect to the 1st electrode 31. The substrate 10 is preferably an SOI (silicon on insulator) substrate having an oxide film and a semiconductor thin film formed on the surface of a holding substrate. The bent part 11 preferably has constitution such that a V-shaped groove is formed in the holding substrate by anisotropic etching and at least one of the oxide film and semiconductor film is left. COPYRIGHT: (C)2004,JPO&NCIPI
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