| 摘要 |
PROBLEM TO BE SOLVED: To improve the adhesiveness of protection layer and resin layer with portions which contact the ink of ink jet head substrate to obtain quality reliability for a long period of time. SOLUTION: A heating resistor forming heating part 108, electrode wiring 105 electrically connected to this heating resistor, and upper protection layer 107 mounted on heating resistor and electrode wiring via protection layer 106, are included. The upper protection layer consists of TaCr alloy. A liquid path forming part 109 made of resin is formed in the upper part of the upper protection layer, and this liquid path forming part is anchored to the upper protection layer. COPYRIGHT: (C)2004,JPO&NCIPI
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