PRESSURE WAVE PRODUCING DEVICE AND METHOD OF PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a pressure wave producing apparatus which has a structure suitable for manufacturing several sets of the pressure wave producing apparatus using a wafer and in which the releasing of ultrasonic wave is prevented in the case of wire-bonding to an input terminal and a manufacturing method of the same. SOLUTION: The pressure producing apparatus is provided with a substrate 1 and a heat insulating layer 2 provided on the substrate 1 and an electrically driven heating element thin film 3 provided on the heat insulating layer 2 . The pressure wave producing apparatus is further provided with a masking layer 6 on the substrate 1 around the heat insulating layer 2. The input terminal 4 is connected to the heating element thin film 3 and extends on the masking layer 6 and the wire-bonding is carried out to the input terminal 4. COPYRIGHT: (C)2004,JPO&NCIPI