发明名称 SYSTEM AND METHOD FOR PROVIDING HIGH BRIGHTNESS ILLUMINATION
摘要 An illumination system includes a plurality of solid state light emitters and a scanner operative to sequentially receive light from the plurality of solid state light emitters and to provide a time-multiplexed light output. The solid state light emitters are each operated in pulse mode to increase their brightness relative to the light output of similar emitters operating in continuous mode. The time multiplexed light output is a generally continuous output having a brightness that is greater than the brightness of the output of similar emitters operating in continuous mode. The time multiplexed light output is useful in photolithography and machine vision applications.
申请公布号 WO2004066352(A2) 申请公布日期 2004.08.05
申请号 WO2004IL00063 申请日期 2004.01.22
申请人 ORBOTECH LTD.;HANINA, GOLAN;KLING, BORIS 发明人 HANINA, GOLAN;KLING, BORIS
分类号 B41J2/455;G02B27/14;G03F7/20;H01L 主分类号 B41J2/455
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