| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method in which physical and thermal damages of a work are minimized, and losses of material during the machining are reduced. <P>SOLUTION: The laser beam machining apparatus comprises a laser beam source 20, an ingot holding unit 12 to hold an ingot 10, a laser beam irradiation member 34 to irradiate laser beams from the laser beam source 20 on a portion to be machined of the ingot 10 held by the ingot holding unit 12, a motor 46 to relatively move the laser beam irradiation member 34 and the ingot 10, and a slider 38 to adjust the distance between the laser beam irradiation member 34 and the portion to be machined of the ingot 10. The laser beam irradiation member 34 has two side plates 50 and 50 and quartz fibers 52 held between the two side plates 50 and 50. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
