MANUFACTURING METHOD OF CRYSTAL VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a crystal vibrator with higher productivity in comparison with a conventional manufacturing method wherein a crystal wafer is polished, and thereafter each crystal chip obtained by slitting the wafer longitudinally and laterally is again polished so that each crystal chip has a specified thickness. SOLUTION: In the manufacturing method for the crystal vibrator wherein electrodes corresponding to the respective crystal chips 2 are formed for the AT-cut crystal wafer 1 and thereafter the wafer is split into the respective crystal chips 2, the thickness distribution of the crystal wafer 1 is measured in advance, the wafer 1 is processed to have a prescribed thickness in response to the thickness distribution and thereafter the electrodes are formed. COPYRIGHT: (C)2004,JPO&NCIPI