发明名称 Semiconductor device having impurity region under isolation region
摘要 In formation of a source/drain region of an NMOS transistor, a gate-directional extension region <41a> of an N<+> block region <41> in an N<+> block resist film <51> prevents a well region <11> located under the gate-directional extension region <41a> from implantation of an N-type impurity. A high resistance forming region, which is the well region <11> having a possibility for implantation of an N-type impurity on a longitudinal extension of a gate electrode <9>, can be formed as a high resistance forming region <A2> narrower than a conventional high resistance forming region <A1>. Thus, a semiconductor device having a partially isolated body fixed SOI structure capable of reducing body resistance and a method of manufacturing the same are obtained.
申请公布号 US2004150047(A1) 申请公布日期 2004.08.05
申请号 US20030748273 申请日期 2003.12.31
申请人 发明人 MAEDA SHIGENOBU;IWAMATSU TOSHIAKI;IPPOSHI TAKASHI
分类号 H01L27/08;H01L21/762;H01L21/8238;H01L21/84;H01L27/092;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L21/84;H01L31/039 主分类号 H01L27/08
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