摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a stress sensor capable of heightening the degree of freedom for a substrate 4 external shape or substrate 4 material selection, and having excellent output balance, concerning the stress sensor wherein a plurality of strain gages 5 and a post 8 as a stress receiving member are arranged on the substrate 4, and stress application to the post 8 bends the substrate 4 and stimulates the strain gage 5, and the direction of the applied stress can be grasped by a characteristic value change of the strain gage 5 caused by stimulation. <P>SOLUTION: The sensitivity of the strain gage 5 arranged on an easily-bendable substrate 4 region is lower than the sensitivity of the strain gage 5 arranged on a hardly-bent substrate 4 region, and outputs to the stresses having the same strength applied to the post 8 are substantially the same in the direction to be grasped. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |