| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope or the like in which image observation conditions to obtain an optimum picture quality can be set easily even if a user is inexperienced in operation of the electron microscope. SOLUTION: This electron microscope is provided with a picture quality setting part 50 to set the picture quality, and the image observation conditions are made possible to be set based on the picture quality set by the picture quality setting part 50. For example, parameters such as a spot size, an acceleration voltage, contrast, and brightness or the like are included in the image observation conditions set based on the picture quality set by the picture quality setting part 50. Furthermore, the electron microscope is provided with a preview function to display a plurality of simple observation images corresponding to the picture quality set by the picture quality setting part 50 on a display part 28. The user is enabled to select the optimum image observation condition among the plurality of the simple observation images of the requested image quality established. COPYRIGHT: (C)2004,JPO&NCIPI
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