Magnetic sensor and method for manufacturing the same

摘要

In order to obtain a magneto-impedance type magnetic sensor having a soft magnetic film facing to a conductive nonmagnetic film, and available a large impedance change with a carrier signal at a relatively low frequency, the magnetic sensor comprises a meander type conductive nonmagnetic thin film of zigzag shape formed with at least one pair of electrode terminals at both ends and a soft magnetic film which is strip-shaped so as to face thereto at a plurality of regions and has an easy axis of magnetization in a width direction of the strip shape, a high frequency carrier signal is applied to the above-mentioned electrode terminals and further a direct current bias magnetic field is applied. By performing AM detection of an AM modulation signal output from the above-mentioned electrode terminals, an impedance change of the conductive nonmagnetic film which is changed by external magnetic field is detected as a change of the high frequency carrier signal, thereby the external magnetic field can be detected.