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摘要
申请公布号
JP2004523878(A)
申请公布日期
2004.08.05
申请号
JP20020524172
申请日期
2001.08.27
申请人
发明人
分类号
C03B25/02;C03C17/22;C03C17/245;C03C17/34;C23C16/24;H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L21/20
主分类号
C03B25/02
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