发明名称 FERROELECTRIC MEMORY DEVICES
摘要 In the present invention, ferroelectric memory devices using a ferroelectric planarization layer and methods of fabricating the same are disclosed. According to the method of the present invention, a conductive layer is formed on an interlayer insulation layer having a contact plug and patterned to form capacitor bottom electrode patterns. A ferroelectric layer for planarization is formed to fill a space between the bottom electrode patterns, and then another ferroelectric layer for a capacitor is formed on the bottom electrode pattern and the ferroelectric layer for planarization.
申请公布号 US2004150027(A1) 申请公布日期 2004.08.05
申请号 US20040758164 申请日期 2004.01.16
申请人 LEE KYU-MANN 发明人 LEE KYU-MANN
分类号 H01L27/105;H01L21/02;H01L21/3105;H01L21/316;H01L21/321;H01L21/8246;H01L27/115;(IPC1-7):H01L21/00;H01L27/108;H01L29/76;H01L31/119 主分类号 H01L27/105
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