APPARATUS AND METHODS FOR IONIZED DEPOSITION OF A FILM OR THIN LAYER

摘要

A coil assembly is described herein that comprises a) at least one coil; and b) at least one boss coupled to the at least one coil, wherein the at least one boss comprises at least two support sections. Methods of forming and/or producing coil assemblies are described herein and comprise a) providing a coil; b) providing at least one boss having at least two support sections; and c) coupling the at least one boss to the coil.