COMPOSITION FOR FORMING SILICON.ALUMINUM FILM, SILICON.ALUMINUM FILM AND METHOD FOR FORMING THE SAME

摘要

A composition for forming a silicon.aluminum film, characterized in that it comprises a silicon compound and an aluminum compound; and a method for forming a silicon.aluminum film, which comprises forming a coating film of the above composition and then subjecting the coating film to a thermal treatment and/or an optical treatment. The composition and the method allow the formation of a silicon.aluminum film with ease and simplicity at a reduced production cost without the need for an expensive vacuum apparatus or high frequency apparatus.