发明名称 COATING METHOD AND SLIT DIE NOZZLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a slit die nozzle which can form a uniform coating film without streaks or unevennesses by stabilizing the interface of a coating liquid during coating and not allowing the coating liquid to remain on the surface of a die lip after completion of coating, and to provide an application method using the nozzle. <P>SOLUTION: The method is to perform the coating with the coating liquid supplied from the discharge opening of a die moving in one direction relatively to a substrate surface, and coating in a die shape and under coating conditions satisfying the following formula (1), 0<&Delta;x/L&le;[cos(&gamma;+&theta;<SB>1</SB>)-cos(&delta;+&theta;<SB>2</SB>)]/[sin(&gamma;+&theta;<SB>1</SB>)+sin(&delta;+&theta;<SB>2</SB>)], wherein &Delta;x is a distance in a direction vertical to the substrate between the downstream edge of a downstream lip and the downstream edge of an upstream lip; L is a length along a coating direction between the downstream edge of the downstream lip and the downstream edge of the upstream lip; &gamma; is an inclination of the upstream lip surface to the substrate; &delta; is an inclination of the downstream lip surface to the substrate; &theta;<SB>1</SB>is a contact angle between the upstream lip surface and the coating liquid; and &theta;<SB>2</SB>is a contact angle between the downstream lip surface and the coating liquid. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004216298(A) 申请公布日期 2004.08.05
申请号 JP20030007804 申请日期 2003.01.16
申请人 MITSUBISHI CHEMICALS CORP 发明人 TORIGOE MINORU;YAMAUCHI YASUTSUGU
分类号 G03F7/16;B05C5/02;B05D1/26;H01L21/027 主分类号 G03F7/16
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