| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room capable of suppressing the stirring-up dust and dirt by the air even in a restricted underfloor area, and a method of circulating air in the clean room. SOLUTION: This clean room 1 comprises a grating floor 20 having a space on the underside thereof, a bay area and a maintenance area formed on the upper surface of the floor and partitioned by a partition 11, and an air feed duct installed at a ceiling part. The bay area excluding the floor surface thereof is covered by the partition 11, and a fan filter unit 10 (FFU 10) of which air volume is controlled by an inverter 22 is installed at the ceiling part. An air velocity sensor 18 transmitting detection data to the inverter 22 is installed in the underfloor area as the space on the underside of the grating floor 20. COPYRIGHT: (C)2004,JPO&NCIPI
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