| 摘要 |
PROBLEM TO BE SOLVED: To reduce usage of a treatment solution by downsizing a treatment tank, and to improve a circulation efficiency by miniaturizing whole the apparatus and keeping the tank inside clean. SOLUTION: This wet treatment apparatus is provided with a transporting holder 12 holding in the air multiple treating objects 1; rail bodies 14 engaged with both lower ends of the holder 12 to introduce it in the prescribed direction to transport it; at least one treatment tank 18 disposed under the rails 14 storing the treatment solution for wet treating the treating objects 1 by soaking them in the solution; and a lifting means 16 liftably holding the treatment tanks 18 under the rail bodies 14, transporting the holder 12, holding the waiting treating objects 1 in the air, and lifting the tank 18 from the downside of the objects 1 to soak them in the solution. COPYRIGHT: (C)2004,JPO&NCIPI
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