发明名称 |
Plasma resistant elastomer parts |
摘要 |
Elastomeric parts having a magnetic flux density of at least 10 gauss on their surface deflect a portion of reactive plasmas from contact with the surface of the parts. Thus, such parts may be exposed to reactive plasmas for longer periods, with less degradation, than may similar elastomer parts that do not have such a magnetic flux density on their surface.
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申请公布号 |
US2004152827(A1) |
申请公布日期 |
2004.08.05 |
申请号 |
US20030689329 |
申请日期 |
2003.10.20 |
申请人 |
IWAMOTO KAORI;RAI BUNICHI;SOGO SHINICHI |
发明人 |
IWAMOTO KAORI;RAI BUNICHI;SOGO SHINICHI |
分类号 |
H01F1/053;H01F1/08;(IPC1-7):C08L1/00 |
主分类号 |
H01F1/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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