发明名称 METHOD AND APPARATUS FOR SUPPLYING FLUORINE GAS AND METHOD AND APPARATUS FOR PRODUCING FLUORINE GAS
摘要 PROBLEM TO BE SOLVED: To provide a fluorine production method capable of supplying fluorine gas safely and inexpensively with a simple apparatus by applying a fluorine production method using a chemical process to an on-site type fluorine production apparatus. SOLUTION: The fluorine production method using the chemical process comprises: a process for mixing raw material powder of fluoride powder such as calcium fluoride and oxidizing agent powder such as vanadium pentoxide and filling a closely sealed vessel 1 with them; a process for loading the closely sealed vessel 1 filled with the raw material in a gas production apparatus 28 provided with a heater 2 and heating the raw material powder inside to a prescribed fluorine production temperature; and a process for taking out the fluorine gas produced by the reaction by heating from the closely sealed vessel 1 and supplying the gas to a fluorine using facility. In this way, the fluorine production method is realized in the on-site type, then various problems of the fluorine supply apparatus using an electrolysis method or an occlusion method are solved, thereby supplying the fluorine gas safely and inexpensively with the simple apparatus. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004217465(A) 申请公布日期 2004.08.05
申请号 JP20030006719 申请日期 2003.01.15
申请人 AIR WATER INC 发明人 KUNIYA SHINGO;KITANO KENZO;IKEBUCHI NAOJIRO;FUKUMITSU TOMOHIKO
分类号 C01B7/20;H01L21/3065;(IPC1-7):C01B7/20;H01L21/306 主分类号 C01B7/20
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